Research On Non-contact Suction Transport Slip Instability Suppression Method Based On Inclination Angle Compensation

The rapid development of information technology has greatly increased the demand for semiconductor components in various industrial fields,such as silicon wafers,solar panels and liquid crystal displays.In integrated circuit manufacturing system,semiconductor silicon wafer processing is one of the most important links.Its processing process contains a series of processes and testing links,and each processing and testing links need to carry on its handling.As the strength of the semiconductor itself is not high,it is easy to lead to breakage and scratches and other problems.In addition,the development trend of components,large size and thin and thin has increased the requirements for transport.Therefore,how to transport such workpieces efficiently and safely becomes an urgent problem to be solved.The contact transportation has been the traditional mode,which easily causes damage to components and affects the quality of products.Thus,the contactless transport mode has great advantages in ensuring the quality of the workpiece.In non-contact transport,air float transport by virtue of its small pollution,no magnetic,no heat and other advantages in non-contact transport shows great advantages.However,the traditional air float transport is driven by static pressure suspension and viscous force,which leads to the problem of large area and high cost of air float platform.In order to solve these problems,this thesis uses Bernoulli’s principle to realize the object inverted suction and flotation,and realizes the stable transport of the object by the method of inclination compensation.The main research contents of this thesis are as follows:Firstly,the working principles of the suction flotation device and inclination compensation in the non-contact suction flotation transportation system with inclination compensation were introduced,and the installation method of the suction flotation device was determined.Establish a flow field model of the suction unit,simulate working conditions using Fluent software,analyze the distribution of gas film pressure and suction force under different parameters,and study the effects of gap height,gas supply flow rate,and tilt angle on pressure distribution and suction force.Secondly,a theoretical model was established for the pressure distribution and suction force of the suction and flotation unit.The effectiveness of the theoretical model was verified by comparing the experimental and theoretical models with Fluent simulation results.Based on the theoretical model of buoyancy absorption,a dynamic model of object sliding process and instability suppression was established.The sliding process model determines the critical state of instability,and the instability suppression model is used for the design of object instability controllers.Thirdly,the kinematics of the inclination compensation device is analyzed,the forward and inverse kinematics model of the device is established,and the working range of the device designed is determined through simulation,which meets the expected requirements.The control quantity in the system control has been determined,and the flow control valve and driving motor are controlled by simulating voltage to achieve the control of suction buoyancy and device movement.According to the fractional order Sliding mode control principle,the controllers for object instability suppression and device inclination compensation are designed and simulated.Finally,design and build an experimental device for suction and floating transportation.Using a flow control valve to adjust the gas supply flow rate to change the magnitude of suction buoyancy to achieve sliding instability control of objects.The angle of object rotation is used as the rotation angle of the inclination compensation device to achieve angle compensation,so that the object remains parallel to the device during the compensation process.Through the comparison experiment of PID controller and sliding mode controller on the whole absorption and floating transportation system,the experimental results show that compared with the PID controller,the sliding mode controller has no overshoot,the stable state is basically error free,and the control effect is good,meeting the control requirements of the system transportation.