Research On Self-reference SPR Sensors Based On Metallic Micro/Nano Array And Stacked Films

Surface plasmon resonance（SPR）sensors are playing an increasingly important role in biosensors,chemical sensors and industrial measurement instruments due to their advantages such as non-tagged detection,non-destructive measurement,real-time monitoring,and high sensitivity.However,SPR sensors are susceptible to unstable environmental disturbances such as temperature or humidity change,light source intensity fluctuations and optical device drift,which seriously affect the stability of the sensor.In order to enhance the stability of SPR sensors,this paper designs self-reference SPR sensors based on the combination of metallic micro/nano array and stacked dielectric films by the finite difference time domain（FDTD）method.And the characteristics and performance of the proposed sensor are studied through the method.The main contents of the paper are as follows:1.A self-reference SPR sensor with high Q factor and stability based on the combination of one-dimensional（1D）metallic micro/nano rectangular grating array and three-layer stacked dielectric films is proposed.The characteristics of the sensing mode in1D metallic micro/nano array and the self-reference mode formed by the coupling between the three-layer stacked dielectric films and the metal are analyzed through FDTD method.And the sensing performance and self-reference performance of the sensor are studied by the method.After optimizing the parameters of the proposed sensor,the sensitivity and FOM of the sensing mode reach 500nm/RIU and 238RIU^-1,the Q factor of the self-reference mode reaches 4668,and the stability of the sensor reaches 602.2.In order to further improve the performance of self-reference sensors,this paper designs a self-reference SPR sensor with the better performance based on the combination of two-dimensional metallic micro/nano rectangular hole array and four-layer stacked dielectric films.The composite structure of rectangular hole array and stacked dielectric films can excite more modes.Based on the mode analysis,the performance of the sensing mode and self-reference mode is optimized by researching the effect of the composite structure’s parameters.The sensitivity and FOM of the sensing mode have been increased to 800nm/RIU and 320RIU^-1,the Q factor of the self-reference mode has been increased to7368,and stability of the sensor has been improved to 1600.The research of this paper provides a useful guideline for designing new biochemical sensors,high Q filters and advanced photonic devices.The proposed self-reference sensors have the potential application prospects in the field of industrial measurement.