Study Of MEMS Digital Sensor Acquisition System

The geophone is the key equipment used in seismic exploration, the performance of the geophone influences the effect of seismic exploration. High precision exploration needs good quality geophones with wide dynamic range and low distortion and anti-jamming. The traditional geophone cannot reach the needs. Micro-Electro Mechanical System (MEMS) that Seismic data acquired with is broadband and high frequency, which can meet the high precision seismic exploration and help people to find the little traps, gas and oil. Now the foreign company is in leading place of this technology. So study and Develop the digital geophone which based on MEMS accelerometer are imperative.This paper analyze the development of the geophone, technique actuality and needs of the high precision Seismic exploration, developing direction of geophone and the advantages and disadvantages of the MEMS digital sensors compared to the conventional geophones. The following Study is based on MEMS digital sensor and acquisition system.1) MEMS accelerometer is key part of digital geophone and its feature affect the performance of the digital geophone. By studying theory of the accelerometer, structure and testing method, to elect good quality MEMS chip.2) By studying the theory of digital sensor, consist, the data acquisition, data transmit and synchronization, designed and fulfills the acquisition system which can get data with digital sensor. The noises control is key factor during designing.3) The testing of the digital sensors is a difficult point, designed the scheme of testing and software that control acquisition by specific protocol, retrieve and save data. Fulfilled noise ,anti-jamming and vibrometer testing . Compared the difference between digital sensor and magnetic sensor.4) Finished testing on site compared the digital sensor made by ourselves, digital sensor imported and conventional geophone. By analyzing the data. We find that the feature of digital sensors is better than the analog sensors. The specification of digital sensors which we designed is nearly the same with the foreign digital sensors.The study of digital sensor and acquisition system promote the Using of the digital sensors based MEMS in high precision exploration.