Higher Order Harmonics Suppression Research And Key Components Developing Of Spectral Radiation Standard And Metrology Beamline

During the past decade, with the rapidly development of Spaceflight, Aviation, War industry, Extremely Ultraviolet Lithgraphy, Microfabrication and Large Scale Integrated circuit, the vacuum ultraviolet (VUV) spectral range has become more and more important. In parallel to the development of VUV research and applications, the need for radiometric standard, quantitative radiometric measurements, and dedicated facilities for the characterization of radiation sources, detectors, and optical components became apprent. Since synchrotron radiation (SR) from bending magnets is calculable, stable, continuously tunable radiation in a broad spectral range and reproducible, this is why VUV radiometry laboratories are at present operated at several storage rings.Spectral Radiation Standard and Metrology Beamline and Station (MS) are the first special beamline and station for VUV metrology established in the Second Phase Project in NSRL. In this thesis, optical structure and equipments in MS are introduced, a 0.6m long vacuum differential system used in two branch in MS and a portable ionization chamber for calibrating the wavelengths and investigate the resolutions power of beam lines are designed and manufactured, higher order contributions in MS are researched by the use of transmission grating (made in house) and IRD AXUV100G (USA) photodiode (PD) detector. The exit beam can be dispersed by the transmission grating behind exit slit of the monochromator and the contributions of the different orders analyzed. The higher order distributions have been quantitatively determined for three gratings of line densities of 1800, 600 and 200//mm. The research of Al, Si₃N₄ and Zr filters higher order suppressing property also have been done. The innovations of this thesis are described as following:1) A four orders pressure differential vacuum system in 0.6m long is developed successfully which guarantee the MS installing time table and Second Phase Project pass the national examine. During the MS installation and adjustment, the...