| This paper is supported by combined funds, which includes the 863 National Project"Development of multi-Degree of freedom precise piezoelectric actuator", the national nature science foundation project"The theoretical and experimental research on a new micro piezoelectric translation mechanism"and the special fund for doctoral subject of college and university"The research on micro stick-slip mechanism driven by piezoelectric elements".The inertial piezoelectric actuators have been become an important branch in the precise actuation field as their unique drive method and predominance. Based on the summarization of domestic situation and abroad, the piezoelectric stacks are commonly used in the inertial actuators. The reason is obviously, the piezoelectric stack bears some advantages such as high displacement resolution, agile response and high stiffness efficiency. It also bears some disadvantages, however, such as tiny deflection, disequilibrium of push and pull, inconvenience to fix lumped mass, high cost, etc. These disadvantages greatly constrain the development and application of the inertial type precise actuators. A new 2-DOF inertia impact actuator (abbr. IIA afterwards) driven by piezoelectric bimorph is put forward and developed in this paper. As well known, piezoelectric bimorph has the ability bends equalized along two-direction and is easy to be joined with impact mass. Furthermore, its cost is lower than that of piezoelectric stack. So, cantilever bimorphs with lumped mass on the free-end are used for drive elements in stead of stacks in the new IIA forementioned. The impact force generates when the ramp voltage is applied and its magnitude can be changed through special adjustment mechanism. Therefore, precise translation movement or rotary movement can be achieved by the impact effect. During the developing progress,...
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