Design And Applications Of Large Format Laser Direct Writing System

Nowadays, with the development of holography and its applications, newand high requirements for laser direct writing (LDW) system appearsincreasingly.In the dissertation, based on inteferece LDW with high precision for smallarea lithography, several key technologies in HoloMaker-â…¢systems,especially mechanical structure and controlling circuit in this system, arestudied. By using diode-pumped solid state laser (DPSSL) as an opticalsource, 610mmX800mm optical variable image can be obtained on thephotoresist surface by changing image data structure to digital controlledsignal which controls laser pulse emitting and the movement of thedisplacement platform.A new type of interefence optical head has been designed in thisdissertation. By replacing binary beam splitter in the rolling cavity including agrating, various optical diffraction images can be realized. By using linearmotion actuator and high precise grating ruler which realize an enclosedlocation controlling, a high repetitive positioning accuracy can beimplemented. The accuracy between different dots is 1 micron and that inevery dot 0.5 micron. The speed reaches 500dots/s in the dot-dot lithographyand 3000dots/s in the vector lithography. This lithography system will have aimportanat value in the industry.