Research Of Low-Pressure Glow Discharge Plasma On Sterilization Application

High-frequency low pressure glow discharge plasma sterilization technology is very high economic and has market prospects. This research is designed to study high-frequency glow discharge in low-pressure with two different forms of electrode. By using dual-Langmuir probe determined the basic parameters of the plasma characteristics. Generalized discharging disciplines under different air pressure and by different electrode types. Sterilization experiments were done under different discharging conditions. The theoretical basis was provided to the low pressure glow discharge plasma sterilization device.High-frequency high voltage power supply is designed for low pressure glow discharge. Half-bridge inverter is applied to implement the transformation of the power supply. The MOSFETS of the bridge are driven by UC3825 which provides commutative trigger signals. Developed high frequency high-voltage transformer with low leakage induction. Fixed the output power, voltage and frequency adjusting range to basically meet the needs of this research.The research proceeded high-frequency glow discharge experiment with parallel plate electrode and the center electrode. Analyzed glow discharge characteristics with respect to different electrodes form. Verified Paschen's law in low air pressure by parallel plate electrode. Analyzed the symmetry of plasma uniformity, generalized the disciplines of the glow discharge current, voltage. Proposed that the phase difference between discharging voltage and current differ with the change of plasma sheath.Langmuir probe is used as the measurement of the basic parameters of the plasma. Interpreted the working of single and double Langmuir probe. Suggested the applying conditions of each type of the probes. Dual-probe is applied to measure basic parameters of the plasma by different probe types, analyzed the factors and differences.Finally, availability of sterilization is verified. Through two electrode structure under different are carried out to generated plasma in the sterilization experiments. Analyzed the relationship between the sterilization effectiveness and the density, electronic temperature and other factors. Then generalized some disciplines of the High-frequency glow discharge plasma sterilization.