| The essay is aimed at studying the chemomechanical polishing processing of ZnSe ,the performance of polished sample ,the design of 10.6 m m antireflection film on ZnSe substrate and the performance of the coated sample. ZnSe is a kind of ideal window material. Firstly we analyze mechanical performance and optical performance of ZnSe material. Secondly, we introduce a set of practical and effective processing technology on the basis of a large number of experiments. In the essay, we discuss the factors that have an effect on polishing efficiency of ZnSe material as well as the effect that manufacturing procedure has on macroscopic stress of ZnSe material. We also test the processing parameter, surface quality and transmittance after we process the ZnSe material. The result shows that chemomechanical polishing processing we have applied is efficient and practical. At last, we design 10.6 urn antireflection film on ZnSe substrate and analyze the selection to coating material and material of evaporation source. In addition, we test optical performance and fastness and come to an conclusion that these performances are excellent.
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