Study On Slender Hole Ultra-precision Measuring System And Precision Analysis

Nowadays, with the rapid development of the military and aerospace technology, the demands of large dimension and high accuracy in aperture manufacture is becoming more and more important. No ultra-precision measurement, no ultra-precision manufacture. The work described in the dissertation is researched under this background. Focused on the improving the slender hole diameters measurement accuracy, a new method of pneumatic measure slender hole diameters are performed in this thesis. The slender hole ultra-precision automation measuring system is designed ,which is based on the trait of pneumatic measure ,and the primary error source of system is analyzed. Three parts constitute this system, which are measurement, control and data processing. The accuracy of the sample system is 0.5μm.The dissertation focuses on the key theory, method and techniques of improving the aperture diameter measurement accuracy. The main research concerns on the following lists:1,Compared with existing devices and principles of the aperture diameter measurement, a new measurement diameter is performed, which is based on pneumatic measure .2, Based on the study of the key theory, method and techniques, The slender hole ultra-precision automation measuring system is designed.3, The mathematical model of measurement error is established. The influence of component design error and mechanical fixing error is all considered in this model. Through study of coordinate relationship between measurement probe and workpiece, the localization error of ultra-precision measurement mechanical is attained based on coordinate transform method.4, The primary error source of system is analyzed, and the method and measure is proposed and adopted to realize high accuracy measurement.The method of the slender hole ultra-precision automation measurement is simple, and the precision of the localization error is low. The error analysis and experiments indicates that the pneumatic measure is one of the non-contacting measurement with high precision, ease of realizing automation and good practical methods .