Preparation And Properties Of DLC Thin Films By Magnetron Sputtering

Diamond-like carbon is amorphous carbon films. Films contain a certain number of sp3 bonds, which contains a series of excellent properties closer to the diamond. It has advantage of low deposition temperature and large deposition area, so it has been widely studied.The first chapter is a brief overview of the DLC films related to the structure and properties. Introduce the DLC films' research background, significance and the films preparation methods, application.Chapter II of this paper describes DLC films' preparation methods and techniques. Using the indirection relations of resistivity and the process parameters to studied the sputtering processing. With the increasing working pressure films' resistivity increases, then decreases that the sp~3 bonds content in the first increases and then decreases. With sputtering power increased the films' resistivity increases first and decreases after, which illustrate the first increasing and then decreased of sp~3 bonds. With substrate DC Negative Bias increased the films' resistivity increases, which show that sp~3 content increased with the DC bias voltage increases.Chapter III, Using Raman, XPS spectroscopy studies the structure of the films. The morphologies of the films were studied by AFM, SEM. The result shows that the films contain a certain number of sp~3 bonds. RF DLCs' sp~3 content is above DC DLCs'. The DLC Raman spectrum show sp~3 content of the films is increased with the increasing working pressure in DC sputtering. Morphology analysis shows that the film is compact, smooth and the bonder of the layer is tight. Surface roughness of DC DLC film is lower than that of RF DLC film which has high film quality.Chapter IV, the Ti/TiN/DLC multilayer was prepared on stainless steel and Si (100) substrate. XRD and Raman spectra show Ti (211), TiN (200) preferred orientation of Ti/TiN layer on substrate and the carbon film layer is a typical DLC structure layer. SEM images show multi-layer coating has a dense and smooth transition bonder. Use Hogmark and Jonssons' theoretical formula to separates films hardness from compound hardness, the results shows that films hardness is above 30GPa.Chapters V, gives the background of CNx research and current research progress and status. CNx films were deposited by RF reactive magnetron sputtering. Raman spectra showes that the film is a typical diamond-like coating. XPS analysis of the structure of the films found the contain C=C/C-C bond, C-N bond. C = N bond, N≡C, C-O bond.