MEMS Seismic Geophones Test Methods

As a key device in micro inertial measurement equipment, MEMS accelerometer,which has advantages of small size, light weight, low cost, low power consumption,compatible with integrated circuit technology, is widely used in automotive, medical,aerospace, military and other fields. Therefore, research of MEMS accelerometer has avery important significance and value.Based on the fundamental principle of accelerometer, this article suggested how to test MEMS seismic geophone, a detail description is given of the structure and readout circuit of MEMS capacitive accelerometer. With analyzing the damping coefficient, stiffness coefficient, a structure of readout circuit based on switch capacitor amplifier is proposed, and the mechanical noise and circuit noise is analyzed.This article design and study the testing methods and contents. Fulfilled noise,anti-jamming and vibrometer testing by acquisition system. Researching MEMS detector dynamic parameters and test methods.By analysised performance of MEMS seismic geophone, introduced the test methods of frequency range, distortion factor, and dynamic range. The results of actual measurement proved the correctness and feasibility of testing methods.