Analysis Intelligent Piezoelectric Micro-Cantilever Beam Based On Finite Element Method Of Mathematics

Piezoelectric micro-cantilever beam is a microdevice with small size, low cost, high sensitivity, simple structure and easy to integrate, etc. Which have been widely used in chemical, biological, environmental monitoring and many fields. The reason to use dynamic models of Piezoelectric micro-cantilever beam to detect, because which with a frequency change detection method is highly sensitive and a wide dynamic range. Using the dynamic model of Piezoelectric micro-cantilever beam to detect and analyze some gas, liquid ingredients, have become a hot research at home and abroad. Although application prospect of piezoelectric micro-cantilever is optimistic, however the cantilever various performance parameters is how to affect the sensitivity of the cantilever beam, there is no systematic research. This paper is based on math finite element analysis of piezoelectric micro-cantilever beam and taken it as the research subject. On the basis of finite element analysis and piezoelectric micro-cantilever beam.Through the finite element analysis, and used its related software to simulate piezoelectric micro-cantilever beam verifies the modal analysis result. The main researches content are as follows:(1)There are two ways of modal analysis piezoelectric micro-cantilever beam. First of all, through the way of mathematics finite element to get the resault; Second, through software simulation to get its experimental solution. Taking the first ten order modal, observe its formation, and verify the deviation between the theoretical solution and test solution.(2)Combined with solid physics knowledge and finite element method to build a mathematical analysis model, then applied large-scale finite element analysis software to simulate piezoelectric micro-cantilever beam, and discuss various parameters influence on the resonance frequency of micro piezoelectric cantilever beam such as the electrode layer, piezoelectric layer, silicon dioxide layer, substrate layer material, propertiesof elastic constants and thickness, etc.(3)Combined with the force coupling with electricity mathematical base, analysis each parameter in fluent with the sensing sensitivity of piezoelectric micro-cantilever beam, such as the electrode layer, piezoelectric layer, silicon dioxide layer, substrate layer material, properties of elastic constants and thickness.Researches show that the material thickness, material properties, elastic constants are significantly affect the resonant frequency of the piezoelectric microcantilever. Meanwhile, the basal layer, the piezoelectric layer, electrode layer, a silicon dioxide layer of material selection have a major impact on the micro piezoelectric cantilever sensor sensitivity. so by selecting the desired mechanical material design appropriate dimensions of the cantilever surface coating of different sensitive layer or select the appropriate thickness of the sensitive layer is simulated and theoretical research, development and design of high sensitivity microcantilever has important scientific significance and academic value.