| Micro-hole array are widely used in various fields, such as automobile and aerospaceindustries. In this study, micro electrochemical machining by using Al-Al2O3mask cathodemethod is put forward to achieve high precision, low cost machining of micro-hole array. Themain contents of this paper are as follows:(1)The mechanism of micro electrochemical machining by using Al-Al2O3mask cathode wasresearched. According to the numerical simulation and finite element analysis, it was indicatedthat with thicker ceramic insulation layer and lower processing voltage, better forming precisionwould be obtained, but the electrolytic efficiency would be declined. The thickness of Al on theAl-Al2O3mask cathode has no influence on the size of micro ECMed structures.(2)The experimental system of micro ECM by using Al-Al2O3mask cathode was set up. Thestainless steel and pure titanium foil were machined by ECM. According to the result, with lowerelectrolyte concentration&processing voltage as well as thicker the ceramic insulation layer,better forming precision could be achieved, but the machining efficiency would be declined just asthe simulation result showed. Hence the results were validated.(3)The processing parameters were optimized based on (2). The optimized parameters were asfollows: the mass fraction of LiCl in methanol solution is5%; the thickness of the ceramicinsulation layer is200μm; the processing voltage is5V. With these parameters, micro-hole arrayswith an average diameter of554.7μm and a mean square error of12.7μm on stainless steelworkpiece were machined. For titanium, the results are575.8μm and15.8μm, respectively. |
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