Research On Trajectory Precision Of Two-dimensional Gantry Type Linear Motor Driven Aerostatic Bearing Stage Based On TURBO PMAC2

Traditional transmission mode of precision stage about rotary motor and ball screw has hardly meet the precision automation processing need, the perfect combination of aerostatic bearing stage, linear motor servo driving and advanced control strategies has become the trend in high speed and high precision automatic processing. The research of aerostatic bearing technology and linear motor servo control methods is a hot spot in the field of high speed high precision technology around world in recent years.On the whole the key technology of two-dimensional gantry type linear motor driven aerostatic bearing stage consists of structure and control technology, which can be divided into static pressure gas floating rail technology, servo motor control algorithm, experimental and testing technology, etc., while the tracking accuracy is one of the most important indicator to evaluate the comprehensive performance of Work platform, which is the premise to realize high speed and high precision of the aerostatic bearing stage. This paper sets up linear servo full closed loop control system model based on Turbo Pmac2, and adopts the method of electrical and mechanical co-simulation and experimental analysis, mainly research on the motor servo control system, Turbo Pmac2 PID control algorithm and the measurement and compensation on trajectory precision of the aerostatic bearing stage. The main research contents are as follows:1、Analyzing the development situation of linear drive precision air-bearing stage and the research status of the key technology on servo control system actuality, Combing with two-dimensional gantry type linear motor driven aerostatic bearing stage hardware system, Selectting PID plus feedforward control method based on Turbo Pmac2, and theoretical research on the trajectory precision of the two-dimensional gantry type linear motor driven aerostatic bearing stage.2、A three closed loop control system model of the X axis and Y axis linear motor based on Turbo Pmac2 is established, which includes the current loop PI controller, and speed loop PD controller, and position loop PID controller, Designing a three closed-loop PID servo controller with speed and acceleration feedforward, and doing matlabsimulation analysis about X axis aerostatic bearing stage servo control system. At the same time the aerostatic bearing stage linear motion trajectory characteristic is analyzed at the presence of feedforward controL3、Introducing the experiment system of the two-dimensional gantry type linear motor driven aerostatic bearing stage, By analyzing the Turbo Pmac2 principle of PID algorithm, we using WINPE32 PR02 PID setting module to set traditional PID gain parameters of X Y axis of the two-dimensional aerostatic bearing stage, and then using the information storage function of the aerostatic bearing stage control card, we carries on linear trajectory experiment of X axis aerostatic bearing stage under different speed,and researchs on the precision of trajectory and trajectory tracking accuracy of different PID gain parameters. Finally making research and analysis arc trajectory tracking precision by doing two axes linkage arc trajectory experiment of two-dimensional aerostatic bearing stage.4、Establishingthe eiectrical and mechanical co-simuiation model of aerostatic bearing stage with MATLAB and ADMAS software. Combining with experimental identification of characteristic parameters of gas film stiffness, we analysis the trajectory tracking precision features of X axis aerostatic bearing stage nnder different speed, and analysis the influence of parameters, as the proportional gain coefficient P,the integral gain coefficient I, the differential gain coefficient D, on the linear motion characteristics of X axis aerostatic bearing stage,and research on the change laws of arc trajectory tracking precision of the X axis and Y axis linkage of aerostatic bearing stage.5、Withlaser interferometer measurement tools we make the experimental validation studies on linear motion trajectory precision for X axis aerostatic bearing stage, and experimental analysis the influence of parameters, as the proportional gain coefficient P.the integral gain coefficient L the differential gain coefficient D, on the linear motion trajectory precision of X axis aerostatic bearing stage, At the same time with the cue instrument measuring too! we make X axis and Y axis linkage arc track precision accuracy experiment of aerostatic bearing stage, through the research on the error analysis and compensation of the test results, ultimately enhance two axes linkage arc trajectory precision of the aerostatic bearing stage.