Glass Micromachining Process Research And Mhd Micropump Prototype Development,

Magnetohydrodynamic(MHD) micropump is a new microfluidic component, which can propose electrolytic solution by Lorentz force caused by orthogonal electrical and magnetic field. It can generate continuous reversible flow, with readily controllable flow rates. Because the work substance is electrolytic solution, which is compatible with chemical solution, MHD micropump can be used for delivery of biochemical medicine and flow injection. MHD micropump has a low operating voltage or current operating mode, and also has a simple and effective energy transformation means to other components used in biochemical system. In addition, MHD micropump have simple structure and no specific requirement on different types of substrate materials, and can be integrated into any position of microfluidic system. Accordingly, in this paper MHD micropump has be researched and fabricated for application. It can be integrated into capillary electrophoresis chip to replace electro-osmotic sampling and realize continuous change of samples and repetitive use of chip, which can shorten the time of continuous detection, simplify the detection device, and have important research purpose and wide foreground.The importance and difficulty of this paper is the research on fabrication of DC MHD micropump. The innovation is the fabrication of MHD micropump prototype individually with glass and silicon. The fabrication of DC MHD micropump must be based on mature microfabrication technology, however, the microfabrication technology of glass is premature. So this paper has mainly introduced two parts, one is research on glass microfabrication technology, the other is research on the fabrication of DC MHD micropump.This paper consists of seven chapters,Chapter One, Background. This paper has introduced the research background, which includes the basic concept of Micro-electro-mechanical system and MEMS technology, capillary electrophoresis chip used in biochemical field, the types and research present state of micropumps, and presented the research meaning and target.Chapter Two and Chapter Three belong to the first part, Research on glass microfabrication technology. This part has introduced research on glass wet etching, glass-glass direct bonding and silicon-glass electrostatic bonding used for the fabrication of MHD micropump in detail. The etching scheme for glass micro-components with different deep and the simple bonding scheme have been reached.Chapter Four, Chapter Five and Chapter Six belong to the second part, Research on the fabrication of DC MHD micropump. This part has mainly presented structure and fabrication design of MHD micropump based on MHD theory and planar microfabrication technology, basic theoretical research, the fabrication experiments, performance experiments research on MHD micropump. Three types of MHD micropump has been fabricated individually with glass and silicon. This part has analyzed and generalized the problems in the experimental research, advanced the next experimental scheme, and at the same time created the preliminary mathematic model, simulated the flow field of MHD micropump with FLUENT software, which has a certain instruction to the experiments of MHD micropump.Chapter Seven, Summary. This chapter has generalized the research findings and the problems in the research of MHD micropump, presented the next research scheme.