| Nano titanium dioxide (TiO2) powders have received considerable attention due to its excellent properties, such as photocatalyst, self-cleaning, water-splitting and antibacterial. However, it is still a challenge to prepare TiO2 thin films with correct phase content (mostly in anatase),narrowed band gap bydoping and controllably nano-sized grains. In this thesis, we presented the studies for preparing TiO2 films by using Sol-gel method and radio-frequency (RF) magnetron sputtering and relative properties.Firstly,anatase TiO2 and La-doped TiO2 thin films have been prepared by using sol-gel method with a post-annealing at 500℃. The crystal structue, morphology and photacatalytic activity were investigated by X-ray diffraction (XRD), atomic force microscope (AFM), UV-VIS spectrophometer and Contact Angle Merers, respectively. The results showed that the doping of La could improve the crystallizating of TiO2, and increase the band gap of TiO2 film,Contact Angle (CA) changes with time are also very different with undoped TiO2 thin films.Secondly, TiO2 thin films were also prepared by radio-frequency (RF) magnetron sputtering. The phase content and microstructure the films were studied by XRD, SEM and (AFM), respectably. The results showed that the pressure of 0.8 Pa and the Ar:O2 ratio of 20:2 are the optimized condition to obtain single anatase phase in the TiO2 films. The decomposition of Methyl Orange was accelerated by using TiO2 film as catalyst under the irradiation of ultraviolet (UV) light.Thirdly, we tried to dope C, Mo into the TiO2 films by using magnetron sputtering. The results indicated that a part of C and Mo entered the TiO2 crystal structure, and the absorption edge of TiO2 thin films were red shifted due to narrowed band gap by doping. |
PDF Full Text Request