Magnetron Sputtering Method Copper Film And Super Hydrophobic Surface Modification Research

Wettability is the inherent characteristic of nature, which plays an important role in people’s life and production. Super-hydrophobic materials has been got wide attention due to its self-cleaning and corrosion protection. Up to now, many super-hydrophobic techniques have been explored; however, super-hydrophobic copper surface prepared by magnetron sputtering has scarcely been reported.Magnetron sputtering method was chosen to prepare the copper films on glass substrates. Moreover, the effect of various parameters, such as the sputtering time, sputtering power, and sputtering pressure were studied comprehensively on the properties of Cu film. The results showed that changes in the sputtering technology parameters had a significant influence on the properties of Cu film, including the wetting properties, structure, surface morphology, and surface roughness. In addition, copper thin films were deposited on different substrates, such as ceramics, glass and quartz. Results indicated that the wetting properties of the copper films were different.The wetting properties of copper formed with self-assembled monolayers (SAMs) of N-dodecanethiol were studied. The results showed that the contact angle of copper changed from77°to177°. Besides, SAMs/copper had a good hydrophobic property with copper pretreated before self-assembled monolayers of N-dodecanethiol were formed.The self-assembled monolayers of N-dodecanethiol was formed on copper film that prepared by magnetron sputtering method. Besides, the effect of sputtering process parameters and substrate material on the wetting properties of copper films were studied. The results showed that the variation of the sputtering process parameters had a modest impact on the contact angle of SAMs/Cu deposited on glass structure, which ranged from108°to120°. However, the contact angle of SAMs/Cu deposited on quartz and ceramics structures were114.5°and129.79°respectively. It explained that the wettability of SAMs/Cu changed obviously with substrate materials.SAMs/Cu formed with monolayers of N-dodecanethiol was deposited on the copper surface which pretreatment in oxalic acid aqueous solution. The contact angel of SAMs/Cu was approximately151°and roll angle of it was4°. Results showed that super-hydrophobic copper surface had a good corrosion resistance in both water and air.