Pulsed Laser Deposition Of Diamond-like Carbon Films And Characterization

The diamond thin film, DLC, is an amorphous carbon film. It has many excellent features,including high hardness and resistance to abrasion, low friction coefficient, which is good wear-resistant surface modified film. Therefore, it has been widely used in mechanics,especially the application of the wear parts and machining tool area.DLC films prepared in this paper uses a pulsed laser deposition method, mainly for DLC films, pulsed laser deposition and film detection apparatus.Irradiating a laser target which is 99% purity and a graphite wafer doped with different concentrations of Ag, varying the experimental parameters, the filmon is deposited on Si substrates, and characterized. This paper, focusing on Raman Spectroscopy and X-ray photoelectron spectroscopy, analies the thin films relying on test results with the relevant theory.When the target is graphite discs with 99% purity, this paper studies the distance between the laser pulse output voltage, the target and the substrate, deposition time, and the effect of substrate temperature on the structure of DLC. When the laser’s output voltage is higher, the distance between the target and the substrate is closer, the deposition time is longer, sp3 key membrane will contain more research and analysis; as the DLC film deposition to an appropriate thickness, there is presence of residual stress in the film and the thin film has a wrinkling phenomenon and separated from the base; with the substrate temperature decreasing,the ratio of sp3/sp2 film will be larger, the film properties of the diamond will be more apparent.When the temperature begins to rise, the amount of film sp3 bonds began to become smaller,sp2 bonds increasing, and to phase transformation graphite, graphite properties of the film is more significant.When the target is mixed with a certain concentration of Ag-doped graphite discs, while maintaining other experimental parameters unchanged, the content of the film in the sp3 bonds will be more than undoped, therefore Ag doping concentration in certain target material will improve film content sp3 bonds. With the increase in doping, the content of the film sp3 bonds will increase, but the doping amount is increased to a certain value, the content of the film begins to decrease, and therefore be sure to pay attention to the amount of its dopingmiscellaneous Ag.