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Preparation And Application Of Functional Micro-/nano-composited Structure

Posted on:2016-11-13Degree:MasterType:Thesis
Country:ChinaCandidate:L WangFull Text:PDF
GTID:2271330482477529Subject:Integrated circuit engineering
Abstract/Summary:PDF Full Text Request
In the process of observing natural biological, it was found that a number of special phenomena, such as the super-hydrophobicity of duck feathers and butterfly wings, special color of peacock feathers super-adhension ability of gecko foot, super-hydrophilic blade structure of Usnea pineapple and Sphagnum.Further studies shows that all sorts of characteristics possessed by these creatures are closely related to their micro-nano structured materials of the surface. Various characteristics of micro-nano structured materials has exhibited a wide application prospect in aspects of daily life, drug testing, national defense construction, So we can obtain the surface material with special properties by imitating similar micro-nano structured materials. Both in the field of scientific research and practical application has a very important significance.Therefore, it’s necessary to promote the micro-nano structured materials preparation technology continuously to be ripe, diverse, industrialized.In this paper, combined with ultraviolet lithography and the preparation technology of nano materials baed on aluminum.Using UV lithography technology to achieve the micron aluminum array structure.And then, use the particular technology to prepare the special nanostructure on the the basis of microns aluminum array structure. Thereby producing the micro-/nano-composited structure with controlled morphology, large area, high repeatability.Firstly, I describe the procedures of preparing the micro-nano porous structured materials by combining UV lithography and anodization technique in detail, explore the effect of UV lithography with different parameters, choose different material as a lithographic substrate, after the completion of the pattern transfer, the best find of silicon, aluminum, followed by glass worstanalyze the influence of different aluminum materials prepared for morphology of nanostructured materials use the scanning electron microscope (SEM) to characterize its topography. I find use once anodizing process for preparing micro/-nano-composited structures contrast secondary anodic oxidation has a better aspect ratio.Secondly, I describe the procedures of preparing the micro-nano sheet structure by combining UV lithography and water bath in detail, confirm the substance that I get is AlOOH by XRD, And analyze the water quality and time impact for nano-sheet structure in the water bath process. explore the stability for nanostructure morphology after annealing at 600℃.Finally, using a contact angle measuring instrument to test the micro-nano composite structures prepared about the wettability, analysis, micro-nano porous structure and a sheet structure of micro-nano structures parameters for invasive impact.and then use these micro-nano structures materials as an enhanced Raman scattering (SESR) substrate, and each Raman test results are analyzed. Finally, the new fundamental researches and applications of these micro-/nano-scale structures are discussed in-depth, and put forward practical method for quickly, efficiently and low-costly fabricating the functional micro-/nano-composited structures.
Keywords/Search Tags:Micro-/nano-composited structure, ultraviolet lithography, anodic oxidation, water bath method
PDF Full Text Request
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