Microstructure And Properties Of Co-Doping Garnet Magneto-Optical Film Deposited

In this paper,co-doped garnet magneto-optical film by multiple alien cations ingcluding Ce3+,Bi3+ and Ga3+ were studied.The A site Ce3+,Bi3+ doped YIG films(Ce_1.0Y₂Fe₅O₁₂,Bi_0.5Ce_0.5Y₂Fe₅O₁₂)and the B site Ga3+ doped YIG films(Ce_1.0Y₂Fe₄Ga₁O₁₂,Bi_0.5Ce_0.5Y₂Fe₄Ga₁O₁₂)was fabricated by single-step pulsed laser deposition（PLD）and one-time annealing.X-Ray diffraction（XRD）,X-ray photoelectron spectroscopy（XPS）,atomic force microscope（AFM）,scanning electron microscope（SEM）and transmission electron microscope（TEM）were used to characterized the phase purity and chemical component as well as the surface morphology and interface structure.he magnetic property at room temperature varying similarly with Faraday rotation and optical transmittance spectra were measured.The effects of doped cations,multilawyers’ sequence and depositon temperasure were proposed.By changing the deposion sequence of seed layer（YIG）,single-step pulsed laser deposition enable the substituted layer to contact the photonics platform directly on Si.The polycrystalline films with the deposion sequence as YIG/Ce_1.0Y₂Fe₅O₁₂/Si and YIG/Bi_0.5Ce_0.5Y₂Fe₅O₁₂/Si have a good surface quality.The films deposited at high temperature（600 oC）have better surface morphology and magnetization property than those at room temperature.The film YIG/Ce_1.0Y₂Fe₅O₁₂/Si has a highest Faraday Rotation ΘF（2250deg/cm）.On the basis of Ce_1.0Y₂Fe₅O₁₂ and Bi_0.5Ce_0.5Y₂Fe₅O₁₂ films,Ga3+ subsituted YIG(Ce_1.0Y₂Fe₄Ga₁O₁₂ and Bi_0.5Ce_0.5Y₂Fe₄Ga₁O₁₂)with a good surface quality were deposited at high temperature using PLD method.The saturation magnetization Ms decreases obviously but transmittance and Faraday Rotation ΘF has improved.Also,the co-doping garnet magneto-optical film and the optical isolator was fabricated by the same method.After the exploration of the depositon and annealing process,the co-doping garnet magneto-optical film on SOI resonator without cracks and flaws was achieved successfully.The insertion loss is under 17 dB and the isolation is 20 dB.