Preparation And Properties Of Magneto-Optical Films For Optical Isolator On Silicon Optical Plates

With the rapid development of modern science and technology,the strategic position of communication industry in modern science and technology is also rising,and in the optical communication system,the role of magneto-optical isolator is increasingly prominent.YIG(Y₃Fe₅O₁₂)series materials have been widely used in magneto-optical isolators due to their excellent magneto-optical properties.However,the important factor hindering the integration of magneto-optical isolators is the immature preparation technology of magneto-optical film.Therefore,this dissertation has made certain research on the preparation of magneto-optical film,and the research contents are as follows:Preparation of target doped yttrium iron garnet.The solid-phase sintering method was used to prepare the target,and the effects of forming pressure,sintering temperature and holding time on the properties of the target were investigated.It was found that the relative density of the target tends to be stable when the forming pressure is more than 25 MPa,the sintering temperature is more than 1350℃,and the holding time is more than 6 h.Then,the influence of doping concentration on the performance of the target was explored.When the Ce concentration of the target is 1,its saturation magnetization reaches the maximum.Moreover,the influence of praseodymium and cerium co-doping on the performance of the target was innovated,and it was found that praseodymium and cerium co-doping could further improve the saturation magnetization of the target.Preparation of monolayer magneto-optical film and process control of composite magneto-optical film.YIG and Ce:YIG(Ce₁Y₂Fe₅O₁₂)films were prepared by pulsed laser deposition on different substrates.It was found that the saturation magnetization of Ce:YIG films deposited on different substrates is higher than that of YIG films.Then,the effects of process parameters on the properties of composite films were investigated,including pulse frequency,deposition temperature,deposition oxygen pressure,annealing temperature and annealing time.It was found that process parameters have a great influence on the properties of the composite films.Only selecting the appropriate process parameters can further improve the magneto-optical properties of the films.Finally,the effects of YIG film thickness and deposition sequence on the properties of composite films were investigated.It was found that YIG film with a thickness of 80nm has the best properties,while the deposition sequence has little effect on the properties of composite films.