Design And Implementation Of Intelligent Control For Microwave Plasma New Material Preparation System

Microwave plasma has in-depth development and application in many professional fields due to its high ionization degree,good purity,stable and safe operation and so on.However,the microwave plasma is often accompanied by the generation of toxic gases and even the risk of electromagnetic leakage during the excitation and operation.The harsh environment caused by these factors affects the physical and mental health of scientific researchers.In addition,due to the large number of modules in the atmospheric pressure microwave plasma material preparation system,the operations required by workers for a material preparation experiment are too cumbersome,so a set of auxiliary control equipment is needed to optimize the operation process of material preparation.The material preparation control system designed in this paper mainly does the following work:(1)According to the control requirements of the plasma material preparation experiment for the experimental conditions,the whole system is divided into a microwave source and a plasma generation module,a gas mass flowmeter module,and a material preparation chamber temperature control module,and then designed separately.(2)The main control circuit design based on STM32 is completed,and it also includes the power supply circuit,the communication interface circuit of each module,and the signal conditioning circuit.Completed the display circuit design based on TFT-LCD touch screen,used as the information display terminal and control input terminal of the entire system.(3)Completed the software design based on ?C/OS-? embedded real-time operating system,mainly including interface display,data receiving and sending,control of each module,etc.,and also realized the scheduling and synchronization between multiple tasks.Meet the design requirements of the overall system.(4)Completed the display interface design based on the emWin graphics library,and designed the operation and running process of the entire system based on its rich control library.(5)After the system design and production are completed,the reliability and stability of the control system are tested through microwave plasma material preparation experiments.