The Preparation Of Nanometer TiO₂ Thin Films By Magnetron Sputtering And Photocatalytic Performance Study

TiO₂ is a multi-functional material that has many advantages such as high photocatalytic activity,physicochemical properties of stability and non-toxic.Thus ithas been applied in the field of environmental protection,construction,etc.However,it is easy to reunite in the water and difficult to recycle.Consequently,the secondary pollution may be triggered.Therefore,the nano TiO₂ thin films were prepared by magnetron sputtering.They will be modified by doping and preparing multilayer composite films.Then the surface morphology and crystal structure of the films were analyzed by means of SEM,XRD,EDS and UV-Vis.Finally,the performance of photocatalytic was evaluated by the degradation rate of Methyl orange.The background,significance and methods of preparation of nano TiO₂ films are introduced.The magnetron sputtering method is used by rubber machine spin to prepare nanometer TiO₂ thin film,according to our laboratory conditions and comprehensive comparison of various preparation methods.The sputtering pressure,sputtering power and annealing temperature were studied in the preparation process.After a comprehensive analysis,in this experiment,the sputtering power of titanium dioxide target was 100w,the sputtering pressure was 1.0pa,the flow value of Ar gas was 35sccm,the vacuum degree was 6.6×10^-4pa,and the sputtering time was 2h.Secondly,Cr doped nano TiO₂ films and C doped nano TiO₂ films were prepared.The influence of Cr doping on the film was studied under different sputtering power.The experimental results show that when the sputtering power of Cr target is 40w,the photocatalytic effect of Cr doped nano-TiO₂ film is better.In the same way,the influence of C doping on the film was studied,and the experimental results showed that the addition of a proper amount of C element could improve the photocatalytic efficiency of the film.At the same time,Remaining other experimental parameters the same,when the sputtering power of C target is 100w,and the heating temperature is 500℃,it can sputter out a certain amount of graphene.The photocatalytic efficiency was improved greatly because of graphene incorporation.Next,Cr and C doped nano TiO₂ films were prepared.On the basis of the above studies,other experimental parameters were kept unchanged,and the sputtering power of TiO₂ target,Cr target and C target is 100w,40w and 100w respectively.Cr and C doped nano TiO₂ films were prepared by magnetron sputtering.The experimental results showed that the degradation rate of Methyl orange was good,and the degradation rate was 47.52%after 3h.Finally,Fe₂O₃/TiO₂ composite films were prepared.On the basis of the first step study on the preparation of nano TiO₂ film,the other experimental parameters were kept unchanged.The sputtering power of Fe₂O₃ target is 100w and the sputtering time is 1h.The Fe₂O₃/TiO₂ composite films were preparated.It was found that the degradation rate of the composite film of Fe₂O₃/TiO₂was 60.44%higher than that of the nano TiO₂ film under the same condition.