Research On Vibration Analysis And Manufacturing Technology Of Carbon Nanotube Resonator

The carbon nanotube resonator is one of the most promising devices of the nanometer electromechanical system(NEMS).Due to its superior characteristics such as ultra-small size,ultra-high frequency,high sensitivity,high stability,and ultra-low power consumption,it has received close attention and extensive research.This dissertation mainly analyzes the vibration characteristics of carbon nanotube resonators,and performs ANSYS modeling and mechanical simulation analysis.The microelectrode structure of the carbon nanotube resonator is developed using NEMS technology,and the related experimental studies are carried out.Firstly,considering the effects of electrostatic force,Van der Waals force and air damping force,a multi-field coupled-vibration model for carbon nanotube resonator with two fixed ends is established.The multi-field coupling free vibration equation of the resonator is deduced.The static displacement,natural frequency and mode function expression of the carbon nanotube resonator with two fixed ends are analyzed,and the free vibration characteristic of the carbon nanotube resonator is analyzed.Secondly,the nonlinear forced vibrational equation of a carbon nanotube resonator with both fixed ends under harmonic excitation is established,and the expression of the amplitude-frequency characteristic for the carbon nanotube resonator is obtained.The amplitude-frequency characteristic of the carbon nanotube resonator is analyzed when the main resonance occurs.Then,the modeling and mechanical simulation of the carbon nanotube resonator are performed using ANSYS software.The static displacement,natural frequency and modal properties of multi-walled carbon nanotube are obtained.Finally,the microelectrode structure of carbon nanotube resonator is developed by NEMS technology,and the electron beam lithography is performed by a nanopattern generator controlled scanning electron microscope.The microelectrode structure of carbon nanotube resonator is processed by a copper film deposition,etching,and stripping.It gives the manufacturing process flow of carbon nanotube resonator.