Analysis And Research On Optical Tool Setting Device Of Ultra-precision Machine Tool

The surface precision of ultra-precision machining is usually in the sub-micron range.When machining spherical or aspherical parts,the tooling error in the horizontal and vertical directions affects the surface accuracy,so the position of the tool is strictly required.In this paper,the tool setting of ultra-precision machine tool is analyzed and designed by combining two different tool setting methods and referring to Moore Nanotech 350 FG machine tool setting device.This tool setting device is designed by combining Industrial camera and internal tool setting mode.In this paper,the coupling device is selected as the fixed interface of the internal tool setting method,and the kinematic coupling device is studied.In this paper,the tool tip position detection algorithm is studied and the algorithm is improved.Finally,the related upper computer software such as the tool tip position detection system is designed.First of all,after integrating the different tool setting devices and referring to the 350 FG ultra-precision machine tool setting device,the coupling device is selected as the interface between the tool setting device and the machine tool,and the image processing is used to detect the tool tip parameters.Secondly,the modeling method of horizontal coupling device is analyzed and improved,and the modeling scheme of vertical coupling cutter device is established on the basis of the improved method.In this process,the modeling method of the no-couplingcenter is established,and the numerical calculation methods of the spherical and rough planes are also improved.The method of establishing the repeatability model of the vertical coupling tool setting device is obtained by analyzing the friction hysteresis of the contact point.Then,Gaussian filtering,convolution,Hough line fitting,least square circle fitting and other related algorithms are used to realize the accurate locating of the tool tip,and calibration is performed by high-precision grating.In the focusing method,this paper adopts the hill climbing method as the raw focus method and the parabola fitting method as the fine focus to rapidly achieve the focus.Next,the two-dimensional focusing platform and industrial camera were programmed to achieve the autofocus software.The spectral confocal probe was programmed to develop a rapid analysis software for measurement data.Finally,the numerical calculation software for rough interface contact parameters calculation was developed using VB.Finally,a repetitive experiment was performed on the kinematic coupling tool setting device on a 350 FG machine to verify the correctness of the previously established coupling model.The accuracy of autofocus was measured by a focus experiment.