Research On The Effect Of Tool Setting Error On Microlens Array In Ultra-precision Machining

As an optical microstructure,microlens array has been widely used in communications,lighting,imaging and other fields.Ultra-precision machining is one of the vital methods to generate microlens array.In recent years,many researches have been done to study the structure design and machining process of the microlens array.However,the research on the effect of tool setting error on machining microlens array in ultra-precision machining is insufficient.In this study,a new ultra-precision turning and milling tool setting method was designed by analyzing the causes of tool setting errors,a model of the effect of tool setting errors on the generating of microlens arrays was established.The main research contents are as follows:1)In the five-axis ultra-precision machine,to solve the problem of the traditional tool setting methods with low accuracy,two new tool setting methods were proposed:round groove tool setting method and linear groove tool setting method.2)According to the mathematical expression of the microlens,a rectangular distribution of the microlens array was established.The equiangular method was used for data point discrete processing.Moreover,the equidistant point method was used for tool nose radius compensation.Finally,the spiral feed method was selected to generate the tool path.3)By analyzing the influence of tool setting errors in different directions on generating of the microlens array,a mathematical model of the effect of tool setting errors on generating of microlens array was established and the general law of the surface error distribution of the microlens array was obtained.4)The new tool setting methods in the feasibility and accuracy and the effect of tool setting errors on creating of microlens arrays were verified by experiments.It was found that there were in good agreement with the theoretical model and the experiments results.