Study On The Application Of Micro USM Removal Mode In 3D Micro Shape Machining

With the continuous improvement of science and technology,there is an increasing demand for micro parts in communication,medicine and other aspects,which promotes the development of micro processing technology.Common micro machining technologies such as lithography,laser machining,micro electrical discharge machining(EDM),micro ultrasonic machining(USM).Among these processing methods,micro ultrasonic processing technology is widely used in brittle materials such as:ceramics,quartz because it is not affected by the conductivity and heat transfer performance of materials.Micro EDM is widely used because it can process any conductive material,the processing equipment is simple,and is not limited by the hardness and strength of the material.Because of its small discharge gap,when the machining reaches a certain depth,the bubbles and debris in the machining area cannot be discharged.The machining fluid is injected into the discharge area through the tube electrode,forcing the machining chips and bubbles to discharge,which improves the machining speed and depth diameter ratio.In micro ultrasonic machining,because of its small removal and machining force,that the ductile material removal mode exists in micro USM.under certain conditions.Based on the experimental observation,the surface roughness,R_pk,is used to identify the existence of ductile material removal mode in micro USM.The impact force of a single abrasive particle is calculated based on the elastic theory and crack generation.The control program is compiled based on LabVIEW,which realizes the functions of tool preparation,data storage,processing mode switching,hole turning,amplitude detection,3D processing,etc.3D micro cavities were machined in quartz by micro USM under different machining conditions.Machined bottom surfaces were measured.Experimental results indicate that the brittle and ductile material removal modes are achievable by controlling the static load of micro USM.Different machining methods have their own advantages and disadvantages.The machining efficiency of micro USM is obviously lower than that of micro EDM,and the machining efficiency is further improved by using tube electrode machining.The existing tube electrode EDM equipment in the laboratory has been redesigned and built to solve a series of problems such as:vibration of the original spindle,unstable outflow of processing fluid,electrode clamping power supply.And the new equipment has been tested for safety and availability to ensure that the equipment can work stably within the pressure range of9Mpa,providing an operation platform for subsequent experimental research.