Study On The Performance Of Micro-Nano Grating Devices

With the arrival of the new era and the rapid development of society,the demand and precision of micro-nano optical devices are increasing,which requires optoelectronic devices to develop towards integration and high performance.With the continuous enrichment of the theory of photonic devices and the increasing improvement of commercial software in recent years,grating has become the focus of research.Therefore,this paper mainly studies the following structural optical devices based on modal method and strict coupling wave analysis method.The main research work can be summarized as follows:(1)In this paper,a four-port grating device with vertical incidence is proposed,which eliminates the efficiency of 0 order and improves the diffraction efficiency of two polarization gratings.(2)In this paper,we show a four-port grating device vertical incident reflection.The grating is a polarization-independent device with good uniformity.(3)In this paper,a polarization-dependent five-channel transmission grating is designed,which improves the diffraction efficiency of TE and TM polarization gratings,has good uniformity and wide incident bandwidth.In addition,the mechanism of this grating can be explained well by coupling overlap integral and field distribution.(4)In this paper,a single-layer reflected five-port grating with vertical incidence is designed.Compared with the double-groove five-port grating,the beam splitting effect is very good.(5)A grating polarization beam-splitting device with second Bragg incidence is shown in this paper.The device adopts T-type new structure and can achieve good polarization beam splitting effect.(6)In this paper,a three-layer fused-quartz grating is designed,which is a polarization beam splitting grating,which not only has good high efficiency output,but also has good extinction ratio.(7)In this paper,a double-layer reflected three-port grating with three-port large-angle incident is presented.The structural parameters of the optical device are analyzed and optimized by vector diffraction theory,and then the coupling mechanism and beam splitting behavior of the grating region are explained by finite element software.(8)In this paper,the structure of double-layer transmission grating with second Bragg incidence without overlay is introduced.The structure parameters of grating are optimized by means of coupling wave and modal method,so that the grating has good multi-channel output.(9)In this paper,a double-groove reflected grating structure with no overlay is proposed,and the parameters of the grating are optimized by strictly coupled wave and modal method,so that the grating has good multi-channel output.