Preparation And Properties Of TiAlSiN Compositional Gradient Films And TiN/TiAlSiN Multilayered Films By Magnetron Sputtering

With the rapid development of modern manufacturing industry,cutting tools are constantly updated in order to adapt to more demanding operating conditions,although the single TiN film and TiAlSiN film have high hardness and good thermal stability,their low adhension strength directly affects their practical application.The purpose of this paper is to prepare the TiAlSiN gradient film,TiN/TiAlSiN composite film and multilayer modulating film.On the premise of ensuring high hardness,the adhension strength can be improved and in order to obtain hard film with excellent comprehensive properties.In this paper,a series of TiN and TiAlSiN simple layer films and component gradient films were prepared by magnetron sputtering method,and TiN/TiAlSiN double layer gradient films,composite films and multilayer modulation films with different period numbers were prepared.The effects of nitrogen flow rate on simple layer films and composite films were studied,the effects of different nitrogen concentration variation processes on composition gradient films,and the effects of modulation ratio on bilayer gradient films and multilayer modulation films were studied.The main methods of characterization are SEM,EDS,XRD,film adhesion automatic scratch tester and microhardness tester.The results are as follows:(1)In the experiment to explore the influence of nitrogen flow rate on single layer film and composite film:for TiN single layer film,when nitrogen flow rate is 8sccm,the hardness reaches the maximum value of 2035HV,and when nitrogen flow rate is 10sccm,the maximum adhension strength is 42N.For TiAlSiN single layer film,nitrogen flow rate is 8sccm,optimal comprehensive mechanical performance,maximum hardness is 3409HV,and the adhension strength is 51N.In the co-sputtering TiN-TiAlSiN composite film,when the nitrogen flow rate is 8sccm,the maximum hardness value and adhension strength are 3755HV and 74N.(2)In the study of the composition gradient film,when the change of nitrogen concentration is 8-12-8 sccm,the corresponding TiN and TiAlSiN gradient films hardness reach the maximum,respectively 1963HV and 3633HV,and the adhension strength of TiN film also reaches the maximum of 40N.In the experiment of TiN/TiAlSiN double layer gradient film,when the modulation ratio is 5:1,the hardness reaches the maximum of 3439HV,and the adhension strength also reaches the maximum of 54N.(3)In TiN/TiAlSiN multilayer modulation film with a period of 20,the hardness value and adhension strength under each modulation ratio are integrated,and it is found that the comprehensive mechanical performance is optimal when the modulation ratio is 1:2,the hardness is 3296HV,and the adhension strength is 72N.The experiment of TiN/TiAlSiN multilayer modulation film with a period of 40 is conducted to consider the overall comprehensive performance.It is found that when the modulation ratio is 1:2,the hardness value of 3271HV and the adhension strength of 62N are the best comprehensive mechanical properties.