Experimental Research For DLC Film Deposited By Rf-PECVD Method On Different Substrates

In this research several kinds of high performance Diamond-Like Carbon(DLC) Films, based on radio-frequency plasma enhanced chemical vapor deposition (PECVD) method, are obtained on the different materials substrate (stainless steel, abrasive tools steel Cr12, PMMA and so on) and using working gas Ar/CH4. The resultant films are characterized by Scanning Electronic Microscope (SEM), Atomic Force Microscope(AFM), X-ray diffraction(XRD), X-ray photoelectron spectroscopy(XPS), Laser Raman Spectrum(Raman) and Fourier transformation infrared spectrometer (FT-IR). The Optical performances of DLC film are analyzed by Ultraviolet -Visible Spectrophotometers and the mechanical and frictional characteristics are studied by Microhardness Instrument, Scratch Hardness Tester, pin-on-disk tribometer. At the same time, the self-lubricating and abrading mechanism are also discussed primarily.Rotary Magnetron Arc Ion Plating Technology is used to deposit Ti/TiC and Ti/TiN films as transition layer on the surface of stainless steel as the substrate of these films. Then the transition layer is successfully employed to prepare the top DLC film with satisfactory adhesion. The results indicate that adhesion,hardness and the wearability of DLC films are significantly increased. Through analysis of Raman spectroscopy, XPS and FT-IR and measurement of micro-hardness, it shows that DLC films' structure and properties will change with the parameter during the deposition. The more large number of sp3 hybrid is, the more high hardness of the DLC film is.To solve the adhesive problem between DLC film and Cr12 steel, Cr intermediate layers are prepared by ion beam sputtering technique before top DLC film deposited by rf-PECVD. The results indicate that adhesion and the wearability of DLC flim are significantly increased with the help of doped nitrogen. The research shows that the film is amorphous and the partial pressure of gas N2 effects the construction and performance of the film. Not only the density of sp3 bond but also N-sp3C increases with the partial pressure of N2. The harnessed and elastic modulus of DLC film is twice as high as that of the DLC film without doped nitrogen and friction factor is smaller than that of DLC film without doped nitrogen.The high quality nano-phase DLC film is synthesized by PECVD method on PMMA. The hardness and wear strength of the resultant DLC film is higher than that of PMMA substrate. The wear resistance of DLC film is 10 times larger than that of PMMA substrate. Then, transmittance of the DLC film is studied by UV-VIS spectrophotometer, and the data shows that DLC film possess favorable visible and infrared lights. However, transitivity fell after coating comparing with PMMA substrate, which may come from the mismatching of the film,transition layer and substrate. Furthermore, transmittance of the resultant DLC film increases with self-bias voltage during the deposition.