The Research On Preparation And Properties Of DLC Films With SiOC Transition Layer Structure By Magnetron Sputtering

The diamond-like carbon(DLC)films receive widely attention and research as a functional film due to its unique properties.In this paper,DLC films were deposited on glass by RF magnetron sputtering technique to improve the scratch resistance of glass.In order to solve the problem that DLC film is easy to fall off in practical use,Silicon Oxycarbide(SiOC)thin film is designed as a transition layer to improve the bonding performance between DLC film and glass to meet the practical needs.In order to get the influence of the change of the parameters of the magnetron sputtering on the performance of DLC and SiOC films.The parameters such as sputtering power,working pressure,substrate temperature and argon flow rate were studied which provides a better reference for the application and production of the industrialisation.The main contents are the following items:First,the main structure,performance,preparation method and application field of DLC and SiOC thin films are discussed,and the research background and topic basis are expounded.Second,the basic principle of magnetron sputtering technology,the construction of the experiment instrument and the corresponding technical parameters are discussed.It is confirmed that the graphite target and the carbon siloy ceramic target are used as the preparation materials of the thin film,and a rational experimental project and detection method are designed.Third,the effects of sputtering power,working pressure,substrate temperature and argon flow rate on the structure,transmittance and optical band gap of DLC and SiOC thin films were investigated.Fourth,different SiOC-DLC composite films were prepared on the glass substrate,and the friction and wear properties were tested by UMT module.The results shows that the DLC film with SiOC transition layer has good wear resistance and can protect the glass well.