| This thesis describes an assessment of the piezoelectric, elastic dynamic, mechanic, and manufacturing issues associated with the design, development, and fabrication of a MEMS prototypical piezoelectric micro-motor. The design goal is the simplest feasible piezoelectric micro motor that can demonstrate the MEMS piezoelectric motor concept. The development of MEMS prototypical piezoelectric micro-motor got along with the fundamental, driving mechanism, tiny dimension, simplest structure and maxim power output potential analysis of the piezoelectric motor. A macro-scale experimental test facility for investigating micro driving mechanism for MEMS piezoelectric micro-motor is presented along with results from subsequent experiments. It is shown that the principle required by such MEMS unit fall outside the usual concept for conventional piezoelectric motor. Due to the unorthodox design of the elastic and piezoelectric structure, the stress field mode of operation is introduced along with the traditional elastic dynamic and piezoelectric regime. The new stress field mode is exploited to implement a novel rotational stress field piezoelectric micro-motor scheme that enables stress field operation. Analysis for both modes of operation is presented along with experimental results. A high-order, efficient scheme for computing both the power and the electric perimeter of the MEMS piezoelectric micro-motor system is presented along with comprehensive analysis for this class of motor. The scheme is then used to perform a mini sized prototypical MEMS piezoelectric micro-motor system. The prototypical motor dimension reaches 3mm that is the smallest motor between the corresponding period and congener. From a fundamental understanding of the driving physics for operating MEMS devices with this class of motor are deduced and minimum requirements for the accompanying measurement systems are established. Ancillary issues such as crystal formulation and Rayleigh wave formulation etc. are discussed.
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