| Micro-machined gyroscopes have a variety of application in both military and civil scopes due to their small size, light weight, low cost, high reliability, being able to be produced in batch and to be integrated with electronic circuits. Many efforts will been spent in researching low cost, small size, and modest performance micro-machined gyroscopes. In this dissertation, the mechanical model of a new type micro-machined gyroscope with electrostatic drive and piezoelectric thin film read-out is analyzed, and the results may be the guideline to choose the optimum one.The main content in this dissertation can be summarized as following: (1) The history and development status of micro-mechanical vibration gyroscopes are reviewed briefly. (2) For proving the fundamental mode of the structure can measure angular rate, the program ANSYS is used to analyze the mode of the structure.(3) The formulae on calculation the driving force is given, and the factors of influencing the driving force are analyzed. (4) The vibration equation of micro-machined gyroscope is established, then based on Castigliano's second theorem, the stiff coefficient are analyzed. (5) Then, combining with piezoelectric effect, elastic mechanics, composite mechanics, vibration theory, stress theory, the statistic analysis has been done with particular emphasis on the elastic characteristics of the thin film. (6) A calculation of certain practical micro-machined gyroscopes size is done.By means of the mechanical analysis of micro-machined gyroscope with electrostatic drive and piezoelectric thin film read-out, we get an analytical expression about the output charge and the input angular rate, which provides theoretical foundation for the design of gyroscope.
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