Light-Beam Stability And Vibration Control Of Opto-Mechatronics Systems

With the extension of application fields of optical systems, equipments that combine numerous research achievements have walked from laboratories to engineering. For the devices running under badly vibrating condition, such as machining tools and measuring instruments using laser, and vehicle, air, bomb-borne laser system, influences of mechanical vibration on the performance cannot be ignored. Based on the requirements of the ATP technique in laser communications and high-energy laser weapons, this dissertation investigates the light-beam stability and vibration control techniques of optical systems in vibrating environment. The main work includes:1. Aiming at estimating and analyzing the misalignments of the paraxial optical system caused by mechanical vibration, the vibration misalignment of light-beam propagating matrices of lens and planar reflector are derived by the theory of geometric optics and matrix optics. The light-beam tracing equations are presented under three-dimensional displacement misaligned condition of the optical lens and plane reflect mirror. Due to these propagating matrices, the propagating recursion model of optical system is developed, which provides theoretical method of estimating and analyzing vibration misalignment of light-beam. To forecast the light-beam misalignment caused by vibration of a Galileo telescope system, an application is developed by using C++, and reasonable analysis results are obtained.2. Based on the linear elastic vibration theory and the finite element method, the dynamics method of the mode characteristics and the vibration displacement response of the optical platform structure are described, and the dynamics response expressions under periodical vibration and random vibration are provided. Time domain dynamics response, frequency response function and root mean square value are taken to evaluate the vibration influence on the light-beam propagation performance quantitatively. A Galileo telescope system mounted on an optical platform is analyzed, and the time domain dynamics response, frequency response function and root mean square value of the light-beam misalignment are obtained.3. For passive control technique of the optical platform to isolate the foundation vibration, the rigid body dynamics model of the platform structure is established, the formula of the six-DOF vibration transmissibility of the platform rigid body structure is provided, the affection to the vibration isolation performance of the states of rigid supports, air-spring flexible supports and various ratios of damp ratio are calculated and compared. Consideringthe special requirements of platform foundation vibration passive isolation, the principles to decouple the foundation excitation and rotation response of the ATP by adjusting the stiffness of air-springs are given.4. Aiming at the platform with self-exciting vibration problem caused by the driving of the aiming tracking device, the theory of the self-exciting vibration active control of the optical platform, and the dynamics differential equations of the electromechanical system are derived based on Lagrange-Maxwell equations. The laws and algorithms of the active control are provided, and the numerical simulation of an optical platform is finished. The optical platform foundation vibration and the coordinating control problem of the platform with self-exciting vibration are considered, and the feasibility of the combination of the foundation vibration passive isolating technique and self-exciting vibration active control is discussed.5. Based on the light-beam propagation analysis of misaligned optical system in vibration environment, an essential idea of light-beam stability control is proposed. The methods of measuring the actuating displacements and vibration displacements of fast steering mirror (FSM) are discussed, and the algorithm used to compute the expected actuating displacements of the FSM is presented.6. A novel piezoelectricity actuator with 3-DOF is fabricated, and its structure and working principles are present...