Studies On TiN Film Coating Setup For Stainless Steel Pipe Chamber Of Accelerator And Relative Experiments

High quality beam becomes a crucial goal in modern accelerators with the development of experiment technology. As the bearer of charged beam and its vacuum environment, vacuum chamber has a strong effect on the quality of beam. As a result, improving the quality of vacuum chamber material is very important to make sure the performance of accelerators and to speed up the development of accelerator physics and technology. Surface pretreatment by film coating is one of the main methods to improve the characters of vacuum chamber material. Experiments of coating stainless steel vacuum chamber with TiN film were done and comparison of stainless steel vacuum chamber before and after coating is provided.A TiN coating setup for stainless steel pipe vacuum chamber was designed. A set of parameters were settled after many experiments under which the coating experiments can run very stably and the vacuum chamber can be coated with the required thickness in a short time. We demonstrate the scheme of DCM sputtering for TiN coating on the same setup, construct a solenoid magnet, and have done some primary TiN coating experiments with DCM sputtering.Thermal outgassing rate test experiment was carried out before and after a stainless steel pipe chamber was coated with TiN film. To get comparatively exact results, we use an auto-bake setup and write a program for vacuum gauges which can automatically save data at fixed time. The results show that TiN film coating can do lots of good to decreasing the outgassing rate of stainless steel material.PSD experiments were done before and after the chamber was coated with TiN film in MSB beamline of NSRL. We use the same program to monitor the vacuum gauges and save data at fixed time interval. The results show that TiN film coating can dramatically reduce PSD yield of stainless steel chamber.Vacuum chambers made of material which is of higher SEY will cause electron cloud effect in positron, proton, and other heavy ion accelerators, which may do harm to beam and disturb normal operation of accelerators. SEY tests for coated and uncoated samples were done in a designed setup. The results show that TiN coating has a positive effort to lower the SEY of stainless steel material.At the end, theoretical analysis about sputtering process was done, and a program to simulate the process was written to calculate the relation between sputtering rate and other parameters. Some conclusions are presented.