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Modeling And Control For Piezoelectric Actuated Motion Stage

Posted on:2015-01-04Degree:DoctorType:Dissertation
Country:ChinaCandidate:H C QinFull Text:PDF
GTID:1222330428465906Subject:Mechanical and electrical engineering
Abstract/Summary:PDF Full Text Request
Typically, flexible electronics manufacturing is one of the forefront fields in the intelligent manufacturing science and technology. Precision positioning and tracking, as one of the key technologies to implement flexible electronics manufacturing process, play crucial roles in the industry and scientific research. As a carrier to realize precision positioning, piezo-actuated micropositioning system has been widely used in the precision equipments due to its nanometer resolution, high output force, fast response, high energy density, no backlash and friction. As the polar material, however, its inherent nonlinearities, including hysteresis, temperature characteristics, creep and dynamics, directly degrade piezo-actuated systems’tracking and positioning performance and thereby bring about difficulties and challenges to apply the piezoelectric actuators to precision positioning and manipulation.To successfully apply piezo-actuated micropositioning stages to flexible electronics multi-scale manufacturing process, this dissertation systematically investigate the corresponding modeling and control methods for precision positioning and tracking in mesoscale. The main research contents are as follows:Firstly, the experimental research on the inherent hysteresis of typical piezoelectric actuator is conducted to anatomize the mechanism of hysteresis using inversion of electric field. Phenomenological theory of thermodynamics are used to deduce the energy equations for the electric field’s inversion in piezoelectric crystals and reveal the source of hysteresis.Secondly, the nonlinear hysteresis model of micropositioning stage is established, where the essential restrictions on model’s parameters are also deduced. Modified Particle swarm algorithm is also used to determinate the parameters in the proposed hysteresis model. This model is further modified to tackle with the asymmetry of the hysteresis curve and substantially promote model’s performance. Lastly, inversion-based hysteresis control and vibration control of micropositioning stages are designed to approximately linearize and smooth the systems output. Second-order twisting sliding mode controller, whose convergence has been proved, is designed to build the feedback control system with feedforward compensation. Additional experiments are conducted to validate feasibility of the controller under various type desired trajectory. Finally, the application of the established controller to electrohydrodynamic inkjet printer further validate its tracking and positioning performance.
Keywords/Search Tags:Flexible Electronics Manufacturing, Piezoceramic, Constitutive Nonlinearity, Nonlinear Hysteresis Model, Parameters Identification, Compensation of Hysteresis, Vibration Abatement, Sliding Mode Control
PDF Full Text Request
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