Study On The Key Technology Of The Echelle Spectrometer And Its Application System

Laser Induced Plasma Spectroscopy,Microwave Plasma Torch Spectroscopy and Raman Spectroscopy has an important significance in different fields.In order to improve the optical performance of these spectral analysis technologies,the high performance splitter light module should be selected.The echelle spectrometer with high resolution,high diffraction efficiency and full waveband blazed have an irreplaceable advantage in spectral analysis techniques and become one of the main research directions of spectrometer.However,due to the complexity of the beam splitting process of echelle spectrometer,the technical problems of the two-dimensional spectrum reduction,the optical element parameters calibration and the spectral intensity correction hindering the development of instruments.In view of this,this paper solves some key technical difficulties of the echelle spectrometer,and developes the whole echelle spectrometer,which can be applied to many different spectral analysis techniques.The main work is as follows:Firstly,under the limited optional optical material,the optical design of echelle spectrometer is completed by multiple optimization methods.The designed echelle spectrometer has compact structure,no movable parts and easy to adjust.At the same time,a set of convenient installation and adjustment modes is studied through tolerance analysis,which makes the subsequent instruments easy to install and adjust,and lays the foundation for further promoting industrial assembly and adjustment.Secondly,based on the optical structure of echelle spectrometer,the spectral reduction model of the prism reflective echelle spectrometer and the prism transmissive echelle spectrometer is established.By establishing the relationship between wavelength and image plane coordinates,the two-dimensional spectrum is reduced to one-dimensional spectrum.Thirdly,a method for measuring the refractive index of prism in spectrometer is proposed.The accuracy of the spectrum reduction model of the echelle spectrometer is improved,and the accuracy of wavelength calibration meets the application requirements.At the same time,it provides a new idea for accurate measurement of the refractive index of prism.Fourthly,based on the established model of spectrum reduction,the parameters of optical element system are calibrated.Using this method,the accurate calibration of the echelle spectrometer can be realized,and it can also guide the installation and subsequent use of the echelle spectrometer.Providing convenience for further research and use of echelle spectrometer.Fifthly,a method to calibrate the spectral intensity is proposed and the radiometric calibration of the spectrogram is completed.It makes quantitative analysis of the spectrometer become possible.Finally,the echelle spectrometer is applied to LIPS system,MPT system and Raman system successfully,and then the resolution,wavelength range and wavelength calibration accuracy of the echelle spectrometer have been verified.At the same time,it also provides new ideas for the wider application of the spectrometer in the future,and promotes the further industrialization of the instrument.