Research On Key Technologies Of Micro-spectrometer

Traditional spectrometers are accurate in measuring, but their big volume and high costs limits the scope of their application. The popularity of spectrum detection technology used in the new type of intelligent hardware is an urgent need for the miniaturization, and integration of spectrometers. The development of the MEMS, microelectronic technology, advanced manufacturing technology and computer technology have provided a solid foundation for the miniaturization, automation, digitization and intelligent direction of the spectrometers.Now micro spectrometers have existed on the market in recent years. However, the micro spectrometers have many problems such as stray light, thermal noise, pulse broadening based on the manufacture technique, integration technology and MEMS.In order to improve the precision and accuracy of the measurement system based on the micro spectrometers, we improve the optical system, mechanical system and circuit system The assembly and adjustment of the optical mechanical system in the new micro spectrometers is more convenient after optimal design, moreover, the stray light prevention and noise treatment in circuit system is taken into account. The methods mentioned above has laid a good foundation for the improvement of the micro spectrometers.Spectrum reconstruction techniques mainly analyze the theory and implementation of the techniques that not yet concerned or concerned enough and greatly affected the performance of the micro spectrometers, which include wavelength calibration, nonlinearity correction of CCD, stray light correction, bandwidth correction and radiometric calibration. Based on the existing spectrometers, the five major technologies are added into spectrometer software in existence. It greatly improves the measurement accuracy of the micro spectrometer and sets up a foundation for practical utility.Considering the processing speed and data serialization issues of the spectrometers, we design a spectral pretreatment correction pipeline method (SPCP) that integrates the 5 technologies mentioned above by utilizing our experience in the color correction and video processing engine on CMOS or CCD camera, which provide a basic proposal for processing the real-time data stream of the spectrometers.Based on the SPCP and color parameters measurement theory, we develop a fast real-time spectrum measurement system. The test result show that the flux deviation of white LED is less than 3%, monochrome LED is less than 5%, wavelength accuracy is less than 1 nm and chromaticity coordinates error is less than 0.002 after correction. The parameter errors have reached the accuracy requirements of the foreign similar products. The experiment proved that the method can effectively guarantee the accuracy and precision of the application system based on micro spectrometer. The system can improve the measuring accuracy and precision effectively, and then enhance reliability, repeatability and consistency of the measurement system to meet the requirements of industrial online detection.