Preparation Of NV Color Center In Diamond And Its Applications In Quantum Sensing

Quantum metrology is a new type of practical interdisciplinary subject based on the theoretical framework of quantum physics and metrology,and combining modern experimental techniques in quantum science and metrology science.Quantum metrology is an important application of quantum science for the benefit of mankind,and it is also the only way for metrology to be more accurate.It is not only a product of scientific and technological progress,but also a demand for the development of the times.The development of quantum metrology will help us understand the world more truly and transform the world more profoundly.At present,the quantum precision measurement technology based on the NV color center not only has excellent properties such as stable properties,long coherence time,optical readability,and normal temperature operation,but also can measure electric and magnetic fields,time,stress,heat,and other basic physical quantities non-destructively.With the optimization of measurement parameters and the advancement of experimental technology,the research field and application scope of quantum sensing technology will be further expanded in many fields such as physics,chemistry,biology,material science,and the feasibility and practicality will be further deepened.Main achievement in this thesis includes:(1)The process parameters of the whole process of generation,preparation,processing and detection of solid-state quantum systems based on NV color centers are systematically studied.Through different processing methods,such as different ions,different energies,different doses,different annealing processes,etc.,and through systematic data simulation and more than one hundred batches of complete sample preparation experience,we summarized and optimized the synthesis of diamond based on CVD through ion implanted to produce experimental parameters of color centers.And it can be customized according to different needs to efficiently obtain single(or multiple)color center dot matrix samples and ensemble samples with adjustable concentration,and can be customized to obtain samples with adjustable depth from 10nm to 100nm from the surface.(2)Systematic research on color center growth,processing and testing.We realized the whole processes including diamond synthesis,processing(laser cutting,mask making),ion implantation,high temperature annealing,organic and inorganic(pickling)cleaning,and confocal inspection platform.Solve the problem of material sources in future experimental research and production applications.(3)Systematic study of the changes in the properties of NV color centers by electron implantation,especially including optical,electronic spin and material properties related to quantum measurement.Through electron irradiation,the fluorescence lifetime of the NV color center was extended by 1.3 times,the electron spin coherence time was extended by 1.7 times,the generation efficiency was increased by 24.6 times,and the magnetic field measurement sensitivity was increased by 3.15 times.(4)Based on time gating technology,we used the spin-dependent fluorescence lifetime to filter NV fluorescence to improve the optical signal contrast in spin detection by 1.8 times.And optimize the experimental use of solid-state sensing system based on NV color center.