Investigation of microscale dielectric barrier discharge plasma devices

This dissertation presents research performed on reduced-scale dielectric barrier discharge (DBD) plasma actuators. A first generation of microscale DBD actuators are designed and manufactured using polymeric dielectric layers, and successfully demonstrate operation at reduced scales. The actuators are 1 cm long and vary in width from tens of microns to several millimeters. A thin-film polymer or ceramic material is used as the dielectric barrier with thicknesses from 5 to 20 microns. The devices are characterized for their electrical, fluidic and mechanical performance. With electrical input of 5 kVpp, 1 kHz, the microscale DBD actuators induce a wall jet with velocity reaching up to 2 m/s and produce 3.5 mN/m of thrust, while consuming an average power of 20 W/m. A 5 mN/m plasma body force was observed, acting on the surrounding air. Failure of the microscale DBD actuators is investigated using thermal measurements of the dielectric surface in addition to both optical and scanning electron microscopy. The cause of device failure is identified as erosion of the dielectric surface due to collisions with ions from the discharge.;A second generation of microscale actuators is then designed and manufactured using a more reliable dielectric material, namely silicon dioxide. These actuators demonstrate a significant improvement in device lifetime compared with first-generation microscale DBD actuators. The increase in actuator lifetime allowed the electrical, fluidic and mechanical characterization to be repeated over several input voltages and frequencies. At 7 kVpp, 1 kHz, the actuators with SiO2 dielectric induced velocities up to 1.5 m/s and demonstrated 1.4 mN/m of thrust while consuming an average power of 41 W/m. The plasma body force reached up to 2.5 mN/m. Depending on electrical input, the induced velocity and thrust span an order of magnitude in range. Comparisons are made with macroscale DBD actuators which relate the actuator's output performance and power consumption with the mass and volume of the actuator design. The small size and of microscale DBD actuators reduces its weight and power requirements, making them attractive for portable or battery-powered applications (e.g., on UAVs).