Sensor Array Devices Utilizing Nano-structured Metal-oxides for Hazardous Gas Detection

Methane and carbon monoxide are two hazardous gases which require continuous monitoring by gas sensors in underground coal mines for explosion prevention and toxicity, respectively. This work explored implementing miniaturized gas sensors in this area to simultaneously detect both gases for benefits of increased portability and reduced power consumption of the chemiresistive gas sensor device. The focus of this research was to understand how the particle size, morphology, and microstructure of the metaloxide film affected the gas sensor performance to the two gases of interest on miniaturized gas sensor devices in the form of microhotplate platforms. This was done through three main research studies.;The first was conducted by growing SnO2 nanowires from SnO 2 particles using an Au-catalyst. Growth conditions including temperature, time, and oxygen partial pressure were explored to determine the formation aspects of the SnO2 nanowires. Gas sensor studies were completed that provided evidence that the SnO2 nanowires increased detection to a fixed concentration of carbon monoxide compared to SnO2 particles without nano-structure formation.;A second research study was performed to compare the gas sensor performance of SnO2 nanoparticles, hierarchical particles, and micron-size particles. The nanoparticles were developed into an ink and deposited via ink-jet printing on the microhotplate substrates to control the microstructure of the metal-oxide film. By preventing agglomeration of the nanoparticle film, the SnO2 nanoparticles displayed similar gas sensor performance to methane and carbon monoxide as the hierarchical particles. Both nano-structures had much higher gas sensor response than the micron-size particles which confirms the surface area of the metal-oxide film is critical for reaction of the analyte gas at the surface.;The last research study presented in the dissertation describes an oxide nanoparticle array developed for detecting methane and carbon monoxide in the presence of one another. A design of experiments was constructed and principal component analysis was used for determining the optimum temperatures of the metal-oxide elements. A four element array was developed with the SnO 2 and TiO2 sensor elements able to detect methane concentrations of interest and the ZnO and NiO sensor elements able to detect the carbon monoxide concentrations. A linear based prediction model was developed and tested for accuracy and reproducibility of the model to a series of random gas concentrations.