| Inertial confinement fusion (ICF) is an alternative energy source for the future energy needs in the next century. The materials of the microsphere which confines the D-T fuel inside require high energy transparency (low atomic number, Z), smooth surface, and permeability to H{dollar}sb2.{dollar} Plasma-deposited Be polymer composite coatings with over 50 atomic % of Be and low O content {dollar}(<{dollar}5 atomic %) would meet these requirements.; Several films with a Be to C atomic ratio of close to 2 to 1 which corresponds to Be{dollar}sb2{dollar}C with a surface roughness {dollar}<{dollar} 100 A and acceptable permeability to H{dollar}sb2{dollar} were prepared. The coatings were prepared in a rf-induced cylindrical plasma reactor. Diethylberyllium (DEB) was introduced into the reactor as the precursor. H{dollar}sb2{dollar} was used as the co-reactant for the purpose of reducing internal/compressional stress of the coatings. These coatings were made at substrate temperatures in the range of ambient temperature to 325{dollar}spcirc{dollar}C with various H{dollar}sb2{dollar} to DEB flow rate ratios. These coatings have been characterized by AES, XRD, XPS, SEM, AFM, FTIR, electrical resistivity, and TGA. Permeability to H{dollar}sb2{dollar} through {dollar}sim{dollar}1 {dollar}mu{dollar}m and {dollar}sim{dollar}5 {dollar}mu{dollar}m films was also measured. This is the first successful attempt to prepare Be{dollar}sb2{dollar}C at 250{dollar}spcirc{dollar}C by PECVD at low pressure as compare to prepare bulk Be{dollar}sb2{dollar}C at over 1500{dollar}spcirc{dollar}C by sintering process in a vacuum furnace {dollar}(<{dollar}10{dollar}sp{lcub}-4{rcub}{dollar} mmHg).; It has been found that the Be content decreases along the distance from the DEB inlet. It has also been confirmed that Be{dollar}sb2{dollar}C is the dominant phase in these coatings. The Be{dollar}sb2{dollar}C in these films is resistant to hydrolysis and/or oxidation to dry and moist air in the temperature range of 30{dollar}spcirc{dollar}C to 250{dollar}spcirc{dollar}C. It was found that internal/compressional stress is somewhat reduced by introducing H{dollar}sb2{dollar} into the reactor as a co-reacting gas. |
