| A pulsed laser deposition (PLD) setup based on ablation of a sintered target by a uv pulsed excimer laser to deposit multi-component thin films, was designed and assembled. Ferroelectric thin films of PbZr;A low pressure DC glow discharge was introduced to reduce the effect of lack of oxygen. The low pressure plasma was characterized by employing Langmuir probe diagnostics. The presence of oxygen plasma during ablation improved the electrical characteristics of the films in terms of leakage current, dielectric properties, charge storage density, switching time, interface, retention and fatigue. Effective incorporation of activated oxygen into the PZT structure was found to be the reason for these improvements as was evidenced by the characteristics of the plasma. |
