Physics, technology and electrical aspects of scaled MONOS/SONOS devices for low voltage nonvolatile semiconductor memories (NVSMs)

Posted on:1990-12-12

Degree:Ph.D

Type:Dissertation

University:Lehigh University

Candidate:Libsch, Frank Robert

Full Text:PDF

GTID:1478390017954660

Subject:Electrical engineering

Abstract/Summary:

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Scaled SONOS/MONOS (polysilicon-oxide-nitride-semiconductor)/ (metal-oxide-nitride-oxide-semiconductor) nonvolatile memory devices for low voltage (5-10 V) E...

Keywords/Search Tags:

Devices for low voltage

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