Digital Micro-holography And Its Application To The Measurement Of Microstructures

As the development of micronano processing technology, to measure the surface topography microstructure has become into one of the important contents of micronano processing technology, it also puts forward a higher request. Digital holographic is one kind of technology that can record and store the holograph in digital style, then use a computer to reproduce the phase and the amplitude. According to its ALL-IN-VIEW, on-contact and high resolution characters, this technology is widely used in measuring some parameters, such as surface morphology, deformation, particle, material properties and other parameters of the measurement. Digital holographic microscopy combines digital holography and microscopy, compared to other microstructure surface morphology measurements technology is late, although it has obtained many researchers at home and abroad, still exist many problems to solve in technology.This paper is aimed at measuring the surface morphology of microstructure and analisizing this technology in theory, then design and develops a set of digital holographic microscopic test system based on mach-zehnder interferometer, and a number of measurements are investigated.The major works in the thesis are the followings:1 digital holography and microstructure dynamic measurement of the surface morphology research is discussed in detail and the application of digital holographic microscopy characteristics are analyzed,2 analyze on the principle of record and reproductive processing, and design the surface topography measurement algorithm.3 design and develop a set of digital holographic microscopic test system based on a Mach-Zehnder interferometer, and compiled the corresponding program4 a number of measurements is investigated on this digital holographic microscopic test system, including the assessment and ultra-precision processing micro-lens array mould surface morphology test, MEMS micro-devices surface morphology test, etc.