| The chirped-pulse amplification technique promotes the high-energy and short-pulse laser technology to evolve. It provides opportunities for the inertial confinement fusion (ICF) fast ignition. In the ICF high-energy and short-pulse laser system,The size of diffraction gratings for the compressor and the damage threshold limits that pulse energy and peak power in the system is outputted. So it must have a meter-sized and high efficiency diffraction grating. However, it is difficult to achieve a monolithic large grating directly, Currently It is the best option to obtain large-size grating by mosaic way.There are five kinds of Errors that include Shift,Piston,Tip,Tilt and Rotate for tiled gratings.By the basic principles and methods of tiled gratings, proposed the main design parameters and goals of 2×2 tiled grating and built a lightweight and modular precision array grating. By the micro-nano system with coarse and fine adjustment,adjust three errors of sub-grating that include Piston,Tip and Tilt. By clamping screws on the sides of clamping components, adjust two errors of sub-grating that include Shift and Rotate. As external vibration,the drift of structure and other factors on the impact of the accuracy of tiled grating, presented two kinds of layout methods of micro-displacement sensors and actuators and control algorithms, achieved real-time and closed-loop control for sub-grating. Analysis of dynamic performance shows that tiled-grating meets the requirements of the stability Presented advanced processing technology and assembly methods, reduce the errors of tilted-grating, analysis shows that the accuracy can meet the accuracy of tilted-grating.Spliced four mirrors by mosaic mechanism, The total surface accuracy of four mirrors achieves mosaic index by testing. The path of rays experiment indicated that the design tiling adjusting mechanism may fast real-time adjust 2×2 the array diffraction grating to meet the requirements, and the stable work time is larger than 1 hour.
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