Preparation And Investigation Of Magnetic Fe-Zr-B Thin Films

The development of electronic and magnetic instruments encourages investigation of soft magnetic film materials nowadays .As a kind of good soft magnetic materials, Fe-Zr桞 have aroused great attention to researchers and lots of research work have been done. In this dissertation, Fe梈r桞 thin films have been prepared, then their structures, properties have been studied and the mechanisms of good soft magnetic has been explainpd Fe梈r桞 thin films were deposited on common glass substrates by DC magnetron sputtering technique with Fe梈r桞 ternary alloy target. The microstructures of as梥puttered Fe梈r桞 thin films were characterized by several analysis techniques, such as XRD,TEM, XPS, M鰏sbauer Spectroscopy and so on . The results show that the as梥puttered films are amorphous ; Fe, Zr, B elements were partly oxidized on the surfaces of films and the combination of Fe梈r and Fe桞 are mainly in deeper part. M鰏sbauer Spectroscopy shows six expanded peaks and is symmetrical relative to zero velocity peaks: No analyzable a桭e bcc phase formed; Zr and B atoms around Fe atoms cause the reduction of hyperfine field at Fe nucleus and make the distribution of magnetic hyperfine field give two peaks. The Fe梈r桞 thin films prepared under proper sputtering parameters were annealed at different temperature for ninety minutes and tested by XRD,TEM, VSM .The results show that there is a sharp diffraction peak in XRD spectrum of the film annealed at 5500C ;The films had partly crystallized by annealing and the diffraction peak was thought to be the preferred (110) peak . The results of VSM show that the magnetic properties of thin films have been improved greatly; The magnetization at an applied field of 200kA/m (B2(~) is 1.42T and the coercivity had decreased greatly ,The annealed films consist of bcc phase and amorphous phase and the consistence of two phases is good to decrease the magnetic anisotropy and make films exhibit good soft magnetic properties.