Preparation Of FeCoZrN Thin Films By DC Magnetron Sputtering Method And Characterization Of Its Properties

With the continuous development to the direction of miniaturization, integration, high frequency for magnetic components, the thin-film materials with excellent soft magnetic properties has been in-depth studied, and widely used in recording heads, perpendicular magnetic recording media, thin-film transformer and inductor device. The requirements for these soft magnetic thin films are high saturation magnetization(Ms), low coercivity(Hc), high resistivity(p), appropriate anisotropy field(Hk) and good thermal stability.Fe1-xCox(0.3<x<0.4) alloys have attached much attention for their high saturation magnetization. But it is difficult for Fe1-xCox(0.3<x<0.4) to achieve good soft properties due to its high magnetocrystalline anisotropy and magnetostriction. It was found that when adding N element to Fe-Co alloy thin film, it can reduce coercivity; the addition of Zr element in the alloy can reduce its magnetostriction. So Fe-Co-Zr-N thin films are studied in this thesis.FeCoZrN soft magnetic thin films were prepared by DC reactive magnetron sputtering, Fe65Co35alloy target and Zr pieces are taken as sputtering materials, N2is taken as reactive gas, Ar is taken as sputtering gas. And the films’ structure, surface appearance, magnetic properties and electrical properties are studied.The main results are as follows:(1)(Fe65Co35)913Zr8.7N thin films’ saturation magnetization decrease with the increase of N2/(N2+Ar) flow rate ratio (N2%). When N2%is15%, the film has small coercivity of11.68Oe. The films’resistivity increases with the increase of N2%.(2) When N2%is15%,(Fe65Co35)ZrN thin films’ saturation magnetization decrease with the increase of Zr doping amounts. The films’ coercivity and resistivity both increase. When one piece of Zr exists, the film has good properties. (3) When N2%is15%,(Fe65Co35)91.3Zr8.7N thin films’ saturation magnetization doesn’t change with the increase of thickness. The films’ coercivity gradually decrease and resistivity increase. When the sputtering time is30min, the film has good properties.(4)When N2%is15%,(Fe65Co35)91.3Zr8.7N thin films’ saturation magnetization increases with the increase of substrate temperature. The films’ coercivity and resistivity firstly increase and then decrease, but the coercivity is larger than room temperature. The films which were prepared at room temperature have good properties.