Studies On The Preparation And Properties Of SmCo Thin Films

In the Information Technology era, magnetic recording has been widely used. And with the magnetic recording density continuously increasing, more and more requirements about media structure and property have been proposed for magnetic recording thin films. As the SmCo thin films, which prepared with rf-sputtering in room temperature, possess high coercivity and large uniaxis- crystal anisotropy, makes it as a good kind of high density magnetic recording media.Based on the summarizing of the investigation on SmCo film in domestic and abroad, the amorphous SmCo magnetic thin films are prepared and the influence on the structure and coercivity SmCo magnetic thin films are investigated in this thesis. First of all, the amorphous SmCo/Cr magnetic thin films are prepared by co-sputtering and the magnetic properties are studied through in-situ post-annealing. The results show that when the Co target sputtering power is 220W, the Sm target sputtering power is 54W, the Sm concentration is 17.28%, the composition of SmCo thin film is very close to SmCos. After 600℃, 30min annealing, the coercivity of SmCo films will be increased and the magnetic anisotropy will be changed from in-plane to normal-plane.The SmCo/Cu films are prepared on the glass substrate with rf-sputtering system and composite target. The magnetic properties are evaluated by vibrating sample magnetometer (VSM). And we find that the sputtering parameters, such as sputtering power, time and pressure can greatly affect the coercivity of SmCo/Cu films. When the sputtering power, time and pressure is 60w, 480s and 0.5Pa, respectively. The in plane coercivity as high as 3400Oe are reached. These research results will build on some basis for SmCo thin films application in magnetic recording.