Research On The Fabrication Of Thin-Film Materials By Electrostatic Spray Deposition Techniques

The former research has already conducted the thorough research on the atomization characteristic,the charge way,the electrode structure and the charged two-phase flow. For the purpose of exploring a new kind technology, the prime task of this paper is introducing the electrostatic atomization technique into the preparation of the thin-film in order to deposit uniform thin films of some materials on substrates.In order to understand the electrostatic atomization and deposition characteristic of the micro-scale fluid flow, an electrostatic atomization technique installation has been designed. Experimental research on atomization properties is carried on, and the electrostatic atomization is investigated by PDA and PIV. The atomization modes of the capillary and the flow field are analyzed, the primary coverage of the research work is shown as follows:1,Introduces the advances of the electrostatic spraying in the liquid droplets atomization, droplets charging, transporting flow field and deposition on the targets of the charged droplets, surveys the research progresses of the electrostatic atomization technology and the different atomization patterns.2,Conducts the researches under the different current capacity and the different charging voltage onto the capillary, analyzes the electrostatic atomization patterns of low throughput atomization, using the PDA to survey the drop diameter size under the different conditions.3,An electrostatic atomization technique installation has been designed. Compared to some other thin film deposition techniques, such as chemical vapour deposition (CVD) and physical vapour deposition (PVD) etc., the thin film deposition process using electrostatic atomization is not only cheap but also controllable. This technique has been developed to generate ultra-fine spray droplets.4,Uses the PIV to test the process of the flow field and studies the deposition controlled variables through contrast experiments. Finally obtains the move-motional and depositional characteristic of the solution of the TiO₂- alcohol.5,Combine the experimental study content with the theoretical analysis, studies the elementary theory of the charged droplet's move-motional and depositional process. Discuses the applications and the problems in fabrications of nano-metric thin films by electrostatic atomization deposition technique, along with the critical factors, effects on the microstructures and properties of the nano-metric thin films.